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一维光子晶体纳米表面发射激光器,在标准的300毫米晶片上长大

Eslam M B Fahmy¹, Zhongtao Ouyang¹, Davide Colucci²

¹Photonics Research Group, Department of Information Technology (INTEC), Ghent University - imec, Ghent, Belgium.

Light, science & applications

|February 24, 2026

概括

研究人员使用纳米工程开发了一种新型的表面发射激光器. 这一突破将激光源集成到晶片上,用于先进的光子应用.

科学领域:

综合光子学综合光子学
半导体激光器半导体激光器
材料科学材料科学材料科学

背景情况:

在上激光器的单体集成对于光子学至关重要.
现有的方法在上实现高质量的表生长方面面临挑战.

研究的目的:

提出和展示一个新的表面发射激光集成在.
为了利用纳米桥架工程 (NRE) 进行垂直光合.

主要方法:

在上InGaAs/GaAs纳米的表轴增长使用面积比捕获 (ART).
使用纳米阵列制造平面内空腔.
纳米表面发射激光器 (NRSEL) 的光学送和特征.

主要成果:

在300毫米的晶片上进行光学送NRSEL的第一次实验演示.
在光子晶体带边缘使用连续 (BICs) 中的对称性保护绑定状态实现了激光.
详细描述该装置的远场辐射模式.

结论:

开发的NRSEL技术是朝着高密度,高成本效益的基于的激光器迈出的重要一步.
这种方法使激光源的单体集成成为可能,为先进的光子学铺平了道路.
进一步的研究可能会导致在上电注入表面发射激光器.

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