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基于铜damascene工艺的高性能薄膜坦酸调节器

Mengxin Lin1,2, Zihan Li1,2, Alexander Kotz3

  • 1Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne, Switzerland.

Nature communications
|February 26, 2026
PubMed
概括

研究人员开发了一种可扩展的制造方法,用于使用铜大马士革工艺的薄膜坦酸调节器. 这种集成增强了与微电子的兼容性,提高了光通信系统的性能.

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