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超薄微镜头阵列用于基于3D刻字的动态光束成型
Ruiqi Cheng1,2, Yue Zhang1,2, Shuo Chen1,2
1School of Integrated Circuits, Wuhan University, Wuhan 430072, China.
Micromachines
|February 27, 2026
概括
我们开发了一个可调节的光束造型器,使用超薄的微镜头阵列 (MLA) 进行动态激光应用. 这种可适应的光学系统允许实时点尺寸调制,增强激光材料处理能力.
科学领域:
- 光学和光子学 在光学和光子学.
- 激光技术 激光技术 激光技术
- 材料科学 材料科学 材料科学
背景情况:
- 传统的微镜阵列 (MLA) 具有静态焦点特性,限制了动态光学系统的适应性.
- 静态MLA的制造后调整具有挑战性,阻碍了实时光学调制.
研究的目的:
- 为了演示一个可调节的光束造型器,具有实时点尺寸调制功能.
- 为了克服动态应用的传统MLA中静态焦点属性的限制.
主要方法:
- 制造具有较低比例 (1:187.5) 和连续表面形状的超薄MLA.
- 优化3D光刻和离子束蚀刻 (IBE) 工作流程.
- 在主镜头和MLA之间实现可调节的轴移位,用于光束成形.
主要成果:
- 在超薄的MLA上,实现了光学级表面表面处理,粗度 (Sa) 为3nm.
- 证明了高效的光束均化,可重新配置的工作距离和点尺寸.
- 通过可调节的轴位移实现实时点位尺寸调制.
结论:
- 拟议的可调节束形状器为先进的激光材料加工提供了多功能解决方案.
- 这种高保真,低调的组件弥合了静态光束塑造和动态激光传输之间的差距.
- 可适应的光学系统通过提供对光束特征的动态控制来增强激光材料处理.
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