在小型超声波气体流量计中减轻光束漂移和广泛测量
Shanfeng Hou1, Xueying Xiu2, Chengguang Liu1
1School of Microelectronics, Shanghai University, Shanghai 201800, China.
Micromachines
|February 27, 2026
概括
一个新的微型超声波气体流量计使用特殊的形腔来提高准确度和扩大测量范围. 这种创新的设计克服了声束漂移,以可靠地监测气体流量.
科学领域:
- 工程 工程师 工程师 工程师
- 声学 声学 在声学上.
- 仪器化 仪器化 仪器化
背景情况:
- 超声波气体流量计 (USFMs) 中的声波束漂移降低了信号噪声比 (SNR) 并限制了测量范围.
- 对于更广泛的应用,USFM的小型化至关重要,但在保持准确性方面面临着挑战.
研究的目的:
- 开发一个小型的过境时间USFM,减轻声束漂移.
- 为了提高声传输增益和定向性,以改进流量测量.
主要方法:
- 单个压电微机超声波传感器 (PMUT) 与非轴对称的形腔体的集成.
- 优化形腔的角度组合到 (50°,70°).
- 试验验证声学性能和流量测量精度的实验验证.
主要成果:
- 实现了7.4 dB的传输增益和29.1°的半功率光束宽度 (HPBW).
- 证明了最小的声压减弱 (0.72dB在18.74m/s).
- 显示的指示误差为±2% (<1 m3/h) 和±1.5% (≥1 m3/h),可重复性在0.06-12 m3/h范围内<0.5%.
结论:
- 开发的USFM符合1.5级准确性标准 (CJ/T 477-2015).
- 非轴对称的形腔设计有效减少光束转向,并扩大声学覆盖范围.
- 为大范围小型化气体流量测量提供创新解决方案.
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