微环共振器辅助光热光谱学与集成束光谱
Optics letters
|February 27, 2026
概括
我们开发了一个紧的芯片上光热光谱系统,使用化微环共振器进行敏感的气体检测. 这种综合方法简化了对齐,并使强大的,小型化的高灵敏度传感器成为可能.
科学领域:
- 光子学是指光子学的使用方法.
- 频谱学是一种光谱学.
- 化学传感器 化学传感器
背景情况:
- 光热光谱 (PTS) 为气体检测提供了高灵敏度.
- 传统的PTS系统通常需要对离散光学元件进行复杂的对齐,从而限制了小型化和强度.
研究的目的:
- 为了展示一个紧的,芯片上的光热光谱学 (PTS) 系统与集成束传输.
- 开发一种可扩展的途径,用于强大,小型化和高灵敏度的气体传感器.
主要方法:
- 使用化 (SiN) 微环共振器 (MRR) 作为折射率传感器.
- 采用SU-8波导,直接向传感区域输送波束.
- 集成的和探针束用于监测MRR中的共振转移.
主要成果:
- 为水蒸气达到95ppm的最低检测极限 (LOD).
- 在不同气体度下表现出线性反应.
- 消除了对离散光学元件耗时调整的需要.
结论:
- 集成的芯片上的PTS系统为小型化,高灵敏度的气体传感提供了可扩展的解决方案.
- 将CMOS兼容的光子集成与先进的包装技术相结合,可以提高传感器的强度.
- 这种方法为下一代便携式和高效的气体检测设备铺平了道路.
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