双通道单频谱仪色彩共聚焦连贯度传感器,以减轻薄膜厚度和折射率测量的带宽压缩
Optics letters
|February 27, 2026
概括
一个新的双通道传感器增强了薄膜厚度和折射率测量. 这种色彩共聚焦相干传感器可以提高光学厚度分辨率的十倍,而不会增加复杂性.
科学领域:
- 光学计量学 在光学计量学
- 薄膜分析 薄膜分析
- 频谱学是一种光谱学.
背景情况:
- 传统的单通道传感器在干扰度和对焦信号之间面临多重合问题.
- 现有系统中的外部参考臂可以增加复杂性和限制分辨率.
研究的目的:
- 开发一种双通道传感器,用于同时测量薄膜厚度和折射率.
- 通过将信号合转换为添加形式来克服单通道系统的局限性.
主要方法:
- 实现一个双通道,单光谱仪的色彩共聚焦连贯感应器.
- 消除了对外部参考臂的需求.
- 将多倍信号合转换为添加形式.
主要成果:
- 实现了光学厚度分辨率的十倍提高,从50μm提高到5μm.
- 证明了同时测量薄膜厚度和折射率.
- 保持较低的测量误差:厚度<11微米,折射率<0.02微米.
结论:
- 双通道配置提供卓越的光学厚度分辨率,而不会增加结构复杂性.
- 拟议的传感器对于精确的薄膜表征是有效的.
- 这种方法推进了非破坏性的光学测量技术.
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