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异质集成的坦酸对化调制器用于高速通信
Jiachen Cai1,2, Alexander Kotz3, Hugo Larocque2
1State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China.
Nature communications
|March 1, 2026
概括
在化光子电路中集成的坦酸可实现高速数据传输. 这种新的平台为先进的光子应用提供了卓越的电光性能.
科学领域:
- 光子学和材料科学 材料科学
- 集成光学 集成光学 集成光学
- 电光学是一种电光学.
背景情况:
- 波克尔效应对于超宽带集成调制器至关重要.
- 坦酸 (LT) 与酸相比具有优势,包括更好的光稳定性和更高的光学损伤值.
- 不同质的整合是将材料特性与既定的制造工艺相结合的关键.
研究的目的:
- 在化光子集成电路上展示坦酸薄膜在晶圆尺度上的异质集成.
- 评估这些集成设备用于高速数据调制的性能.
- 建立LT-on-SiN作为RF光子和互连的可行平台.
主要方法:
- 薄膜坦酸盐在化上的晶圆尺度异质整合.
- 制造低损耗化光子集成电路.
- 光学损失,半波电压和调制带宽的表征.
- 使用PAM4和16-QAM信号进行高速数据传输实验.
主要成果:
- 实现了大约14.2dB/m的低光学损失.
- 展示了具有6V半波电压和调制带宽高达100GHz的设备.
- 成功地以333 Gbit/s和581 Gbit/s的净数据速率传输了PAM4和16-QAM信号.
结论:
- 在化上酸酸是高性能光子集成电路的一个有前途的平台.
- 这种集成结合了化波导的优点与坦酸的超快速电光反应.
- 该平台适用于射频光子,光学互连和模拟信号处理的应用.
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