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基于PDMS的直接模式到曲线的微结构通过热气膨胀进行制造,用于微光学.

Md Emamul Kabir1, Sonali Garg2, Paras N Prasad2,3

  • 1SMALL (Sensors and MicroActuators Learning Lab), Department of Electrical Engineering, University at Buffalo, The State University of New York at Buffalo (SUNY-Buffalo), Buffalo, New York, USA.

Small (Weinheim an der Bergstrasse, Germany)
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概括

研究人员开发了一种快速,负担得起的方法,使用加热空气压力创建微镜头阵列 (MLA). 这种技术简化了制造,使光学级镜头可用于各种应用.

关键词:
复合眼 复合眼是一种复合眼.曲线微观结构的曲线微观结构.直接的模式到曲线.双造 双造 双造 双造 双造微镜阵列 (MLAs) 是一种微镜阵列.光学传输率是指光学传输率.热空气膨胀的热气扩张

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科学领域:

  • 光学和光学工程的光学和光学工程.
  • 材料科学与制造 材料科学与制造

背景情况:

  • 传统的微镜阵列 (MLA) 制造方法复杂,需要干净室和昂贵的设备.
  • 现有的技术,如热回流和灰度光刻,涉及多步骤的过程,限制了可访问性和可扩展性.

研究的目的:

  • 为微镜头阵列 (MLA) 引入一种快速,具有成本效益的基板制造方法.
  • 用加热空气压力证明SU-8/图案的转化为光滑的,曲的聚甲基 (PDMS) MLAs.

主要方法:

  • 利用同位方加热空气压力将SU-8/模式成PDMS MLA.
  • 镜头表面粗度,焦距可调和度和光学传导度的特征.
  • 采用双造技术来制造凸凸的镜头对应物.

主要成果:

  • 具有低表面粗度的光学级MLA (平均值在1.18 ± 0.48和3.3 ± 0.9 nm之间).
  • 实现可调节的焦距从127.21到683.05微米,高曲率模式的传导率为83.06%.
  • 成功演示了使用形凸阵列和制造的复合眼的概念验证成像.

结论:

  • 开发的方法为可扩展的MLA制造提供了一种简化,可复制和具有成本效益的替代方案.
  • 减少设备复杂性和处理时间使这种技术适合更广泛的可访问性.
  • 伪造的MLA显示出对成像和光子应用的有希望的功能.