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Updated: Mar 3, 2026

A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy
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在高温下,ALD衍生WO3-x导致几乎没有唤醒的铁电Hf0.5Zr0.5O2

Nashrah Afroze1, Jihoon Choi2, Salma Soliman1

  • 1Department of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States.

ACS applied electronic materials
|March 2, 2026
PubMed
概括

氧化可以提高 hafnium-zirconium-oxide铁电膜的热可靠性. 这一突破通过减少在高温下唤醒周期来提高先进计算的性能.

关键词:
3D整合 3D整合ALD存入了WO3−x 的资金.基于HfO2的铁电制品铁电式记忆器是什么意思在高温下运行.记忆在逻辑上的记忆几乎没有醒来,几乎没有醒来.氧气储存层是氧气储存层中的一个.

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