门电压调节和N2O等离子被动化用于在无电容 2T0C DRAM 氧化物薄膜晶体管中增强保留和内存窗口
Chahwan Yang1,2, Mirinae Lee1,2, Junghoon Han1,3
1Flexible Electronic Device Research Division, Electronics and Telecommunications Research Institute, Daejeon, Republic of Korea.
Advanced science (Weinheim, Baden-Wurttemberg, Germany)
|March 3, 2026
概括
使用Al:ITZO薄膜晶体管的无电容两晶体管-零电容 (2T0C) 动态随机访问存储器 (DRAM) 实现超过1000秒的保留时间. 设备工程增强了内存窗口,并使下一代内存系统的超低功耗运行成为可能.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 半导体设备物理 半导体设备物理
背景情况:
- 无电容两晶体管零电容 (2T0C) 动态随机存取记忆 (DRAM) 通过消除存储电容,在可扩展性和处理方面提供了优势.
- 用添加的印锡氧化 (Al:ITZO) 薄膜晶体管 (TFT) 正在探索提高DRAM性能.
研究的目的:
- 开发和描述基于Al:ITZO的2T0C DRAM,其保留时间和内存窗口得到改善.
- 优化设备级工程,以提高性能和超低功耗运行.
主要方法:
- 对Al:ITZO TFTs进行了N2O等离子处理,通过减少氧气空缺来抑制状态外泄漏和调整值电压 (Vth).
- X射线光电谱 (XPS) 分析证实了氧气空缺的减少.
- 读取晶体管 (RTR) 的通道宽度与长度 (W/L) 比率被调整以优化性能.
主要成果:
- 压制了状态外泄漏,并通过N2O等离子处理微调值电压 (Vth).
- 写入晶体管 (WTR) Vth工程启用了在0V的保留状态操作写入词线 (WWL),实现了超低功率.
- 优化的RTR W/L比率通过抑制电荷损失改善了保留特性.
- 通过平衡RTR Vth和在当前 (离子) 的状态来最大化内存窗口.
- 记忆时间超过1000s,记忆窗口增加了13倍.
结论:
- 基于Al:ITZO的2T0C DRAM证明了下一代内存系统的可行性.
- 设备级工程,包括等离子处理和W/L比率优化,显著提高DRAM性能.
- 拟议的方法为未来的内存应用提供了更好的可扩展性和能源效率.
相关概念视频
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