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Updated: Jul 10, 2026

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
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在基于物理约束的变化自编码器的深度反应性离子蚀刻中,基于人工智能驱动的SEM配置的特征识别

Fang Wang1,2, Hao Yu1,2, Yechen Miao1,2

  • 1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China.

Microsystems & nanoengineering
|March 10, 2026
PubMed
概括

一个新的受物理约束的人工智能模型VLSet-AE,在微电子机械系统 (MEMS) 中自动化扫描电子显微镜分析深度反应离子蚀刻 (DRIE). 这种方法显著提高了智能微型制造的精度和效率.

关键词:
用于微型制造的AI.深度反应性离子蚀刻 (deep reactive ion etching) 是一种深度反应性离子蚀刻技术.模式识别 模式识别 模式识别基于物理学的神经网络.扫描电子显微镜 图像识别 图像识别变量自动编码器变量自动编码器

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相关概念视频

Stereotype Content Model02:16

Stereotype Content Model

The Stereotype Content Model (SCM) was first proposed by Susan Fiske and her colleagues (Fiske, Cuddy, Glick & Xu, 2002; see also Fiske, 2012 and Fiske, 2017). The SCM specifies that when someone encounters a new group, they will stereotype them based on two metrics: warmth—or that group’s perceived intent, and how likely they are to provide help or inflict harm—and competence—or their ability to carry out that objective. Depending on the warmth-competence categorization, a person will feel...
Scanning Electron Microscopy01:07

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
Fundamental Principles
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