对MEMS陀螺仪运行模式的相位错误分析基于力到再平衡速率测量模式
Jia Jia1,2, Han Zhang1, Shixuan Gao3
1School of Automation, Jiangsu University of Science and Technology, Zhenjiang, Jiangsu, China.
Microsystems & nanoengineering
|March 11, 2026
概括
在MEMS中的相位错误限制了科里奥利斯振动陀螺仪的精度. 本研究对控制环中的这些错误进行了分类和分析,并提出了校准方法以提高性能并实现实时补偿.
科学领域:
- * 微电子机械系统 (MEMS) 的应用
- * 惯性传感技术 * 惯性传感技术
- * 控制系统工程 * 控制系统工程
背景情况:
- *强力再平衡 (FTR) 模式对于高精度的MEMS科里奥利斯振动陀螺仪至关重要.
- *控制环中的相位错误显著降低了陀螺仪的准确性和稳定性.
- * 现有的方法缺乏对所有关键环节的相位错误影响的全面分析.
研究的目的:
- *系统地对MEMS陀螺仪控制环中的相位误差进行分类和分析.
- * 调查相位误差对FTR速率测量精度的影响.
- * 制定校准程序以减轻相位误差的影响.
主要方法:
- *系统地对驱动和感知模态控制循环 (前向/反路径) 中的相位错误进行分类.
- *对振幅调节,频率跟踪和速率测量的相位误差效应进行定量分析.
- * 开发和应用用于控制循环的新型校准程序.
主要成果:
- *已确定相位错误是MEMS陀螺仪精度的一个基本限制.
- *量化了相位错误对驱动模式循环性能和FTR速率测量的影响.
- *为感觉模态循环建立了FTR控制架构和校准,详细说明了错误的影响.
结论:
- *相位错误显著影响MEMS陀螺仪的性能,特别是FTR速率测量.
- * 拟议的校准方法为提高准确性和稳定性提供了有针对性的解决方案.
- *结果为实时阶段错误补偿策略提供了基础.
相关概念视频
Gyroscope: Precession
5.7K
Precession can be demonstrated effectively through a spinning top. If a spinning top is placed on a flat surface near the surface of the Earth at a vertical angle and is not spinning, it will fall over due to the force of gravity producing a torque acting on its center of mass. However, if the top is spinning on its axis, it precesses about the vertical direction, rather than topple over due to this torque. Precessional motion is a combination of a steady circular motion of the axis and the...
5.7K
Gyroscope
4.4K
A gyroscope is defined as a spinning disk in which the axis of rotation is free to assume any orientation. When spinning, the orientation of the spin axis is unaffected by the orientation of the body that encloses it. The body or vehicle enclosing the gyroscope can be moved from place to place, while the orientation of the spin axis remains the same. This makes gyroscopes very useful in navigation, especially where magnetic compasses cannot be used, such as in crewed and crewless spacecraft,...
4.4K
Atomic Nuclei: Larmor Precession Frequency
3.4K
The earth's gravitational field produces a 'twisting force' perpendicular to the angular momentum of a spinning mass (such as a spinning top) that causes the mass to 'wobble' around the gravitational field axis in a phenomenon called precession. Similarly, the magnetic moment (μ) of a spinning nucleus precesses due to an external magnetic field directed along the z-axis. The precession of the magnetic moment vector about the magnetic field is called Larmor precession,...
3.4K
Stability of Equilibrium Configuration: Problem Solving
1.1K
The stability of equilibrium configurations is an important concept in physics, engineering, and other related fields. In simple terms, it refers to the tendency of an object or system to return to its equilibrium position after being disturbed. The stability of an equilibrium configuration can be analyzed by considering the potential energy function of the system and examining its behavior near the equilibrium point.
Problem-solving in the context of the stability of equilibrium configuration...
Problem-solving in the context of the stability of equilibrium configuration...
1.1K
Relative Motion Analysis using Rotating Axes - Acceleration
920
Consider a component AB undergoing a linear motion. Along with a linear motion, point B also rotates around point A. To comprehend this complex movement, position vectors for both points A and B are established using a stationary reference frame. The absolute velocity of point B is determined by adding the absolute velocity of point A, the relative velocity of point B in the rotating frame, and the effects caused by the angular velocity within the rotating frame.
Time differentiation is...
Time differentiation is...
920
NMR Spectrometers: Resolution and Error Correction
1.1K
When magnetic nuclei in a sample achieve resonance and undergo relaxation, the signal detected in NMR is an approximately exponential free induction decay. Fourier transform of an exponential decay yields a Lorentzian peak in the frequency domain. Lorentzian peaks in an NMR spectrum are defined by their amplitude, full width at half maximum, and position, where the peak width is governed by the spin-spin relaxation time alone. In real experiments, however, the applied magnetic field is rendered...
1.1K


