通过功能层电阻调制来改善多孔电子发射装置的制造和性能
Jinxin Dong1,2,3, Xiaojing Huyan2,4, Fangzhou Luo2,4
1School of Microelectronics, Shanghai University, Shanghai 201800, China.
Nanomaterials (Basel, Switzerland)
|March 13, 2026
概括
研究人员使用表轴膜改进了多孔 (PS) 电子发射装置 (EED). 这种方法提高了制造统一性和设备稳定性,以获得更好的电子排放性能.
科学领域:
- 材料科学 材料科学 材料科学
- 半导体物理 半导体物理
- 设备工程 设备工程
背景情况:
- 多孔 (PS) 电子发射装置 (EED) 在工艺可控性和制造统一性方面面临挑战.
- 长轴 (epi) 薄膜提供高晶体质量和可调节电阻,有利于设备制造.
研究的目的:
- 提高基于PS的EED的工艺可控性和制造统一性.
- 调查膜电阻调节对PS制造和EED性能的影响.
主要方法:
- 在以PS为基础的EED中采用了表轴薄膜作为功能层.
- 通过离子植入实现了经皮膜的精确电阻调节.
- 使用无照明的电化学蚀刻,使其能够自行终止以提高统一性.
主要成果:
- 电阻调制方案促进了PS的自终止电化学蚀刻,改善了垂直和水平的均性.
- 优化PS表面氧化,对于EED性能至关重要.
- 达到80μA/cm2的最大电子发射电流密度 (Je),具有很高的稳定性.
结论:
- 使用具有调制电阻的表轴膜为PS EED研究提供了一种新且可行的方法.
- 这种方法显著提高了基于PS的EED的制造统一性和工艺可控性.
- 改进的PS制造导致设备性能和电子发射稳定性得到改善.
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