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通过通过构建六角形面板结构来改变侧墙晶体方向来减轻基于GaN的微LED的损伤

Peng Zhang, Haowen Hua, Ying Gu

|March 13, 2026

概括

研究人员开发了一种六角微型LED,以克服先进显示器的尺寸限制. 这种新的结构显著改善光电性质,为高效,小型的微型LED提供了一条道路.

科学领域:

材料科学材料科学材料科学
光电学是指光电子产品.
半导体设备半导体设备

背景情况:

基于化 (GaN) 的微型LED由于尺寸效应而面临挑战,限制了它们在复杂的显示技术中的使用.
传统的方形微型LED结构特别容易受到性能降低,因为设备尺寸减少.

研究的目的:

为了减轻基于GaN的微型LED的尺寸效应.
为了引入一个新的 mesa 结构的 Micro-LED 带有完整的 m 面六角面.
为了增强小型微型LED的光电特性.

主要方法:

一个面板结构的微型LED的制造,具有完整的m面六角面板.
六角微型LED与传统的方形结构的比较.
对外部量子效率 (EQE) 的尺寸效应分析.

主要成果:

与方形结构相比,六角形的微型LED显示出更好的抗干蚀刻和侧墙效应的弹性.
六角微型LED的峰值EQE随着尺寸的减少从15.95%降至14.76%.
方形微型LED的峰值EQE随着尺寸的减少从15.67%降至13.96%,显示出更明显的下降.

结论:

六角形的微型LED设计有效地抑制了尺寸效应,从而带来了卓越的光电性能.
这种制造工艺为开发下一代小型高效微型LED用于先进显示器提供了有前途的方法.

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