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Updated: Mar 15, 2026

Author Spotlight: Introduction to Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays
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DAS-YOLOv13:用于晶圆表面缺陷检测的双轴注意力和特征融合模型

Jingzhe Zhang1, Rui Sun1, Bo Li1

  • 1College of Engineering, Yanbian University, Yanji 133002, China.

Sensors (Basel, Switzerland)
|March 14, 2026
PubMed
概括

半导体晶圆缺陷使用新的双轴增强注意力的多尺度融合You Only Look Once版本13 (DAS-YOLOv13) 模型进行检测. 这种先进的方法显著提高了在晶圆表面识别微小,多尺度缺陷的准确性.

关键词:
这就是DAS-YOLOv13的意思.发现缺陷检测检测缺陷检测双轴注意力模块的注意力模块晶圆片 晶圆片 晶圆片

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