在高Z/低Z异构中抑制二次反击级联损伤:一个机制驱动的FIB战略

Zixuan Zhang1, Kai Wu2, Chuanhong Jin3

  • 1State Key Laboratory for Silicon and Advanced Semiconductor Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China; Jihua Laboratory, Foshan, Guangdong 528200, China.

Ultramicroscopy
|March 15, 2026
PubMed
概括

聚焦离子束 (FIB) 削导致低维材料 (LDM) 异构结构的结构崩. 使用优化的角度和多步骤的能源减少的新FIB策略保护了脆弱的道,实现了95%的结构保留.

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