Abstract:
光学缺陷检测从根本上受到衍射极限的限制,并且基于强度的方法对扰动反射场相位而非振幅的缺陷响应较弱。本文提出一种对相位敏感的结构照明相位导数(SIPD)方法,通过检测重建相位信号中因缺陷引起的对称性破缺来识别缺陷。相干条纹照明将高频空间缺陷信息移入光学通带内,对相移序列进行傅里叶分析可得到一个复场,其相位等于两个非对称滤波通道之间的差值。在无缺陷区域,该相位差变化缓慢且平滑,而局域缺陷则引入显著异常,通过连续相位导数实现选择性增强。在532 nm波长下使用数值孔径为0.4的物镜,可定位小至100 nm的缺陷,远低于瑞利极限,且信噪比高于传统明场照明。该方法为缺陷检测与质量控制提供了一条实用且高灵敏度的技术路径。 关键词:光学缺陷检测,结构照明,相位导数,相位成像,傅里叶分析,相干条纹照明,质量控制,100 nm缺陷,532 nm,0.4 NA物镜
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