Porous Silica Particles Prepared from Silicon Tetrachloride Using Ultrasonic Spray Method

Silica particles having the median diameter of 1 to 3 µm were prepared from silicon tetrachloride vapor by a reaction with water droplets using the ultrasonic spray method. The particle sizes of silicas were controlled by changing the composition of silicon tetrachloride and water. These silica particles had microporous structures from nitrogen and water adsorption measurements. The microporous and mesoporous particles were prepared from the reaction of water droplets including sodium and potassium carbonates with silicon tetrachloride vapor. Copyright 1999 Academic Press.