Use of quantitative convergent-beam electron diffraction in materials science
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Updated: Oct 19, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
R Holmestad1, C R Birkeland, K Marthinsen
1Department of Physics, Norwegian University of Science and Technology (NTNU), N-7491 Trondheim, Norway. randih@phys.ntnu.no
Abstract:
Methods for quantitative convergent-beam electron diffraction are outlined and some results of our applications of convergent-beam electron diffraction are shown, with emphasis on quantitative analysis of crystal structures in materials science. Examples of thickness measurements and determination of lattice parameters are presented. Measurements of low-order structure factors to obtain information on bonding charge-density distributions are reviewed, with examples from TiAl intermetallics. For non-centrosymmetric crystals, a method to determine three-phase structure invariants is given. Determination of polarity is also discussed.
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