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The effect of fast secondary electrons on x-ray microanalysis in the scanning electron microscope
R Gauvin1, P Hovington, D Drouin
1Département de génie mécanique, Université de Sherbrooke, Québec, Canada.
Scanning
|September 14, 1999
Abstract:
In this paper, the effect of fast secondary electrons (FSE), which result from inelastic scattering of incident electrons, on the characterization of materials in the scanning electron microscope are investigated with the aid of Monte Carlo simulations. The effect of FSE on x-ray microanalysis of light elements is investigated. A full description of the Monte Carlo simulations of FSE in solids is given.