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TEM/CBED determination of strain in silicon-based submicrometric electronic devices

Armigliato1, Balboni, Balboni

  • 1CNR-Istituto LAMEL, Bologna, Italy. armigliato@area.bo.cnr.it

Micron (Oxford, England : 1993)
|March 7, 2000
PubMed

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Measurements of Strain

Strain quantifies the deformation of a material under force, typically measured as normal strain, which represents the change in length when compared with the original length. Electrical strain gauges are used for enhanced accuracy. These devices consist of a conductive wire mounted on a paper backing that adheres to the material's surface. These gauges operate on the piezoresistive effect, where the wire's electrical resistance changes in response to mechanical deformation. The strain gauge...