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Related Experiment Videos

State-of-the-art surface acoustic wave linear motor and its future applications

Kurosawa1

  • 1Department of Advanced Applied Electronics, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, Yokohama, Japan. mkur@ae.titech.ac.jp

Ultrasonics
|June 1, 2000
PubMed
Summary

Surface Acoustic Wave (SAW) devices offer high energy density for microactuators. A new electrode design significantly reduces driving voltage to below 10 V, enabling practical applications.

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Area of Science:

  • Materials Science
  • Mechanical Engineering
  • Physics

Background:

  • Surface Acoustic Wave (SAW) devices possess high energy density and small size, making them attractive for actuator applications.
  • High driving frequencies (around 10 MHz or higher) have historically presented challenges for SAW device implementation.
  • The high energy density of SAW devices is particularly appealing for microactuator development.

Purpose of the Study:

  • To investigate the performance of a Surface Acoustic Wave (SAW) linear motor.
  • To address the issue of high driving voltage in SAW devices.
  • To explore the potential of SAW motors as high-speed, high-resolution microactuators.

Main Methods:

  • A Surface Acoustic Wave (SAW) linear motor was constructed and tested using a silicon slider with micro-scale projections.

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  • Performance metrics including no-load speed, maximum output force, and acceleration were measured.
  • A newly designed electrode was implemented to reduce the driving voltage required for wave excitation.

    • Main Results:

    • The SAW linear motor achieved a no-load speed of 1.1 m/s and a maximum output force of 3.5 N with a 4x4x0.3 mm silicon slider.
    • An acceleration of 1000 m/s² was recorded.
    • The novel electrode design successfully reduced the driving voltage to below 10 V.

    Conclusions:

    • The developed SAW motor demonstrates potential as a high-speed, quick-response, and high-resolution microactuator.
    • The reduced driving voltage design enhances the practicality and cost-effectiveness of SAW devices for applications.
    • Further research into the nanotribology of SAW motors is warranted.