Related Experiment Video
Updated: Aug 1, 2026

Lensfree On-chip Tomographic Microscopy Employing Multi-angle Illumination and Pixel Super-resolution
Published on: August 16, 2012
A novel in-lens detector for electrostatic scanning LEEM mini-column
Frank1, Mullerova, el Gomati MM
1Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Brno, Czech Republic. ludek@isibrno.cz
Abstract:
A novel principle of an in-lens detector of very slow electrons is described and the detector efficiency discussed. The detector was built into a coaxial column for a Cylindrical Mirror Analyser for Auger electron microanalysis. In order to obtain a very low energy scanned imaging, a cathode lens was formed between the final electrode of the column and a negatively biased specimen. The signal electrons accelerated within the cathode lens field enter the column and after being mirrored back impact a micro-channel-plate based detector fitted around the optical axis. The acceptance of the detector, expressed as a ratio of the number of electrons impacting the detector to the full emission of a cosine source, was calculated to be 0.86 for 1 eV and 0.985 for 10 eV electrons. Then, the efficiency of conversion into output pulses is 0.35 and 0.31, respectively; these parameters are superior to those of conventional SEM detectors for secondary electrons. Micrographs taken at low energies ranging down to units of eV are presented.
Related Concept Videos
Confocal Fluorescence Microscopy
Overview of Electron Microscopy
Scanning Electron Microscopy
Fundamental Principles
Accelerated...
Capillary Electrophoresis: Instrumentation

