Related Experiment Videos
Nitrogen atom energy distributions in a hollow-cathode planar sputtering magnetron
Summary
Energetic nitrogen atoms (N) were detected in a sputtering magnetron using optical emission spectroscopy. These high-energy atoms, ranging from 1 eV to over 500 eV, likely originate from accelerated N+2 ions dissociatively reflecting off the cathode.
Area of Science:
- Plasma Physics
- Materials Science
- Atomic and Molecular Physics
Background:
- Understanding energetic species in plasma is crucial for optimizing sputtering processes.
- Nitrogen atoms play a significant role in various plasma applications, including material deposition and surface modification.
Purpose of the Study:
- To measure the energy distribution of nitrogen atoms in a hollow-cathode planar sputtering magnetron.
- To identify the origin and formation mechanism of energetic nitrogen atoms.
Main Methods:
- Optical emission spectroscopy utilizing the N I 8216.3 A line.
- Jansson's nonlinear spectral deconvolution method with chi(2)(w) minimization.
- Comparison with VFTRIM computer code simulations.
Main Results:
- Nitrogen atom energies were determined to be between 1 eV and over 500 eV.
- The N I 8216.3 A line was identified as a suitable diagnostic for atomic nitrogen.
- Deconvolved spectra revealed a broad energy distribution for nitrogen atoms.
Conclusions:
- Energetic nitrogen atoms are generated from N+2 ions.
- These ions are accelerated through the plasma sheath and undergo dissociative reflection from the cathode.
- The findings provide insights into plasma-cathode interactions and energetic particle generation.