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Published on: August 16, 2014
Quantum mechanical actuation of microelectromechanical systems by the Casimir force
H B Chan1, V A Aksyuk, R N Kleiman
1Bell Laboratories, Lucent Technologies, Murray Hill, NJ 07974, USA.
Science (New York, N.Y.)
|March 10, 2001
Summary
The Casimir force, an attraction from quantum vacuum fluctuations, was demonstrated in microelectromechanical systems. This quantum electrodynamical effect is significant at nanometer separations in MEMS devices.
Area of Science:
- Physics
- Quantum Electrodynamics
- Microelectromechanical Systems (MEMS)
Background:
- The Casimir force arises from quantum mechanical vacuum fluctuations of the electromagnetic field, causing attraction between uncharged surfaces.
- This force is a fundamental quantum electrodynamical (QED) phenomenon with implications for nanoscale systems.
Purpose of the Study:
- To experimentally demonstrate and measure the Casimir effect in microelectromechanical systems (MEMS).
- To investigate the role of QED effects in MEMS devices at nanometer separations.
Main Methods:
- Utilized a micromachined torsional device featuring a polysilicon plate and a spherical metallic surface.
- Measured the torque-induced rotation angle of the plate as a function of the separation distance between surfaces.
Main Results:
- Observed attraction between the metallic surfaces, resulting in a measurable torque and plate rotation.
- Experimental results for the rotation angle dependence on separation agreed with theoretical calculations of the Casimir force.
Conclusions:
- The Casimir effect can be successfully demonstrated and measured using MEMS technology.
- QED effects, specifically the Casimir force, are significant in MEMS when component separation is in the nanometer range.
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