Towards better scanning near-field optical microscopy probes--progress and new developments
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Updated: Oct 7, 2026

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection
Published on: June 13, 2023
H Heinzelmann1, J M Freyland, R Eckert
1Department of Physics and Astronomy, University of Basel, Switzerland. heinzelmann@urz.unibas.ch
Abstract:
Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.
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