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Silicon couplers for microfluidic applications.

E Meng1, S Wu, Y C Tai

  • 1Caltech Micromachining Laboratory, California Institute of Technology, Pasadena, CA, 91126, USA. ellis@mems.caltech.edu

Fresenius' Journal of Analytical Chemistry
|October 27, 2001
PubMed
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New silicon fluidic couplers connect microelectromechanical systems (MEMS) devices to external components. These versatile MEMS fluidic couplers support high-performance liquid chromatography (HPLC) systems and operate up to 8,963 kPa.

Area of Science:

  • Materials Science
  • Mechanical Engineering
  • Microfluidics

Background:

  • Microelectromechanical systems (MEMS) require reliable external fluidic connections.
  • Existing MEMS fluidic interfaces can be limiting in terms of compatibility and pressure handling.
  • High-performance liquid chromatography (HPLC) systems utilize specific tubing standards.

Purpose of the Study:

  • To design, fabricate, and test novel silicon fluidic couplers for MEMS devices.
  • To ensure compatibility with standard and arbitrary MEMS fluidic port geometries.
  • To evaluate the performance and pressure range of the developed fluidic couplers.

Main Methods:

  • Utilized bulk micromachining and deep reactive ion-etching (DRIE) for fabrication.
  • Designed couplers for standard MEMS fluidic ports with modifications for arbitrary geometries.

Related Experiment Videos

  • Integrated interfaces for PEEK and fused-silica capillary tubing common in HPLC.

    • Main Results:

    • Successfully designed and fabricated multiple silicon fluidic coupler types.
    • Achieved compatibility with standard and custom MEMS fluidic port configurations.
    • Demonstrated a functional operating pressure range of at least 0-8,963 kPa (0-1,300 psig).

    Conclusions:

    • Developed silicon fluidic couplers effectively bridge external connections to MEMS devices.
    • The couplers offer significant design flexibility for various fluidic port geometries.
    • The high-pressure capability makes these couplers suitable for demanding applications, including HPLC.