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Updated: Oct 3, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
07:24

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis

Published on: May 10, 2021

Measurement technique for the incident electron current in secondary electron detectors and its application in

T Agemura1, S Fukuhara, H Todokoro

  • 1Beam Technology Center, Hitachi High-Technologies Corporation, Ibaraki, Japan. agemura-toshihide@naka.hitachi-hitec.com

Scanning
|January 5, 2002
PubMed

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