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Elemental analysis with a full-field X-ray fluorescence microscope and a CCD photon-counting system
Takuji Ohigashi1, Norio Watanabe, Hiroki Yokosuka
1Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennoudai, Tsukuba, Ibaraki 305-8573, Japan.
Journal of Synchrotron Radiation
|April 25, 2002
Abstract:
The first result is presented of an X-ray fluorescence microscope with a Wolter mirror in combination with a CCD camera used as an energy-resolved two-dimensional detector in photon-counting mode. Two-dimensional elemental maps of metallic wires, such as Fe, Co, Ni and Cu, and inclusions of a synthesized diamond could be obtained with an energy resolution of 350 eV.