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Elemental analysis with a full-field X-ray fluorescence microscope and a CCD photon-counting system

Takuji Ohigashi1, Norio Watanabe, Hiroki Yokosuka

  • 1Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennoudai, Tsukuba, Ibaraki 305-8573, Japan.

Summary

This study presents the first X-ray fluorescence microscope using a Wolter mirror and a CCD camera. It successfully mapped elemental distributions in metallic wires and diamond inclusions with high energy resolution.

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