Artificial neural networks for automation of Rutherford backscattering spectroscopy experiments and data analysis

We present an algorithm based on artificial neural networks able to determine optimized experimental conditions for Rutherford backscattering measurements of Ge-implanted Si. The algorithm can be implemented for any other element implanted into a lighter substrate. It is foreseeable that the method developed in this work can be applied to still many other systems. The algorithm presented is a push-button black box, and does not require any human intervention. It is thus suited for automated control of an experimental setup, given an interface to the relevant hardware. Once the experimental conditions are optimized, the algorithm analyzes the final data obtained, and determines the desired parameters. The method is thus also suited for automated analysis of the data. The algorithm presented can be easily extended to other ion beam analysis techniques. Finally, it is suggested how the artificial neural networks required for automated control and analysis of experiments could be automatically generated. This would be suited for automated generation of the required computer code. Thus could RBS be done without experimentalists, data analysts, or programmers, with only technicians to keep the machines running.