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High-precision shape measurement by white-light interferometry with real-time scanner error correction.

Joanna Schmit1, Artur Olszak

  • 1Veeco Instruments Incorporated, Tucson, Arizona 85706, USA. jschmit@veeco.com

Applied Optics
|October 10, 2002
PubMed
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This study introduces a new method to improve high-precision shape measurement using white-light interferometry. It corrects optical path difference errors from scanning devices, enhancing accuracy for discontinuous structures.

Area of Science:

  • Metrology
  • Optical Engineering
  • Surface Metrology

Background:

  • White-light interferometry enables high-precision shape measurement of objects with discontinuous structures.
  • Existing techniques rely on detecting the coherence envelope peak but are susceptible to optical path difference (OPD) errors introduced by scanning devices.

Purpose of the Study:

  • To develop a novel technique for measuring and compensating OPD errors in white-light interferometry.
  • To enhance the accuracy of shape measurements for discontinuous structures.

Main Methods:

  • A new method measures OPD changes directly from interference fringes during measurement.
  • Scan information is integrated into an algorithm to correct errors in real-time.
  • The technique requires no extensive data storage or post-processing.

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Main Results:

  • The proposed technique successfully compensates for scanner-induced OPD errors.
  • Improved measurement accuracy is achieved for object shape.
  • The method also corrects for slowly varying vibrations.

Conclusions:

  • The developed technique offers a robust solution for accurate shape measurement using low-coherence interferometers.
  • It is easily adaptable to existing systems without significant modifications.
  • This method enhances the reliability of interferometric measurements for complex surfaces.