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Transmission two-modulator generalized ellipsometry measurements.

Gerald E Jellison1, C Owen Griffiths, David E Holcomb

  • 1Solid State Division, Oak Ridge National Laboratory, Tennessee 37831, USA. jellisongejr@orml.gov

Applied Optics
|November 5, 2002
PubMed
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A novel two-modulator generalized ellipsometer accurately measures linear diattenuators and retarders. This advanced optical instrument simultaneously determines birefringence, diattenuation, and depolarization for various optical samples.

Area of Science:

  • Optical Physics
  • Materials Science

Background:

  • Ellipsometry is a powerful technique for characterizing optical properties of materials.
  • Generalized ellipsometry extends traditional methods to handle more complex optical phenomena.

Purpose of the Study:

  • To utilize a two-modulator generalized ellipsometer for transmission measurements.
  • To demonstrate the instrument's capability in fully characterizing linear diattenuators and retarders.

Main Methods:

  • Employing a two-modulator generalized ellipsometer in transmission mode.
  • Operating the instrument in both spectroscopic and spatially resolved modes.
  • Achieving a spatial resolution of approximately 40 micrometers in spatially resolved measurements.

Main Results:

Related Experiment Videos

  • Simultaneous and accurate measurement of birefringence, diattenuation, principal axis angle, and sample depolarization.
  • Successful characterization of optical samples including mica, Polaroid polarizers, and quartz plates.
  • Generation of birefringence images of samples using the spatially resolved mode.

Conclusions:

  • The two-modulator generalized ellipsometer is a versatile tool for comprehensive optical characterization.
  • The instrument enables precise analysis of linear optical components and depolarizing samples.
  • Spatially resolved ellipsometry provides valuable insights into material homogeneity and optical response.