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Updated: Sep 28, 2026
Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Piezoelectric thick film ultrasonic transducers fabricated by a sol-gel spray technique
M Kobayashi1, T R Olding, M Sayer
1Department of ECE, McGill University, Montreal, Quebec, Canada H3A 2A7.
Abstract:
Thick film broadband ultrasonic transducers (UTs) produced by a sol-gel spray technique and operated below 10 MHz are presented. These UTs are formed by dispersing PZT and LiTaO3 particles, respectively in Al2O3 and PZT sol-gel solution. The 50-100 microm thick films have been deposited on curved steel, flat steel and aluminum substrates and steel rods. Ultrasonic pulse-echo signals with a signal to noise ratio of more than 25 dB are experimentally obtained for the operating temperatures up to 250 degrees C.
