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Updated: Aug 17, 2026

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Patterning via Optical Saturable Transitions - Fabrication and Characterization
Published on: December 11, 2014
Designing a non-volatile imaging switch for mass-persistent, chemically amplified photolithography: a model study
John M Klopp1, Nicolas Bensel, Zachary M Fresco
1Department of Chemistry, University of California, Berkeley, CA 94720-1460, USA.
Abstract:
An acid catalysed rearrangement that transforms a bicyclic lactone into a phenolic carboxylic acid has been tested for potential use in chemically amplified microlithographic imaging.

