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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

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Feedforward suppression of force ripple based on a simplex-optimized dither signal

K K Tan1, S J Chin, H F Dou

  • 1Department of Electrical Engineering, 4 Engineering Drive 3, National University of Singapore, Singapore 117576.

ISA Transactions
|January 28, 2003
PubMed

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