A directional acoustic array using silicon micromachined piezoresistive microphones
David P Arnold1, Toshikazu Nishida, Louis N Cattafesta
1Department of Electrical and Computer Engineering, Interdisciplinary Microsystems Group, University of Florida, Gainesville, Florida 32611-6130, USA.
The Journal of the Acoustical Society of America
|February 1, 2003
Summary
A new microelectromechanical system (MEMS) microphone array offers a cost-effective solution for noise source localization. This directional acoustic array demonstrates comparable performance to traditional systems, enhancing mobility and data processing efficiency.
Area of Science:
- Acoustics
- Sensor Technology
- Signal Processing
Background:
- Advanced sound field measurement using microphone arrays is crucial for noise source localization and characterization.
- Conventional directional acoustic arrays are often costly and complex, limiting their widespread application, particularly in fields like aeroacoustics.
Purpose of the Study:
- To present a microelectromechanical system (MEMS)-based directional acoustic array system.
- To demonstrate key technologies for reducing cost, increasing mobility, and improving data processing efficiency compared to conventional systems.
Main Methods:
- Development of a 16-microphone MEMS silicon piezoresistive array mounted on a printed circuit board.
- Implementation of a high-speed signal processing system for near real-time array response generation.
- Dynamic calibration of microphone sensor modules and characterization in an anechoic chamber using a monopole source.
Main Results:
- The MEMS array achieved an average sensitivity of 831 microV/Pa with matched magnitude (+/-0.6 dB) and phase (+/-1 degree) responses.
- The system demonstrated performance comparable to conventional array systems.
- Significant cost savings were achieved compared to traditional directional acoustic arrays.
Conclusions:
- The developed MEMS-based directional acoustic array offers a viable, cost-effective alternative to conventional systems.
- The system enhances mobility and data processing efficiency for noise source localization and characterization.
- This technology has the potential to broaden the accessibility of advanced acoustic measurement techniques.
