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Absolute interferometer for three-dimensional profile measurement of rough surfaces
Byoung-Chang Kim1, Seung-Woo Kim
1Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Science Town, Daejeon 305-701, South Korea.
Optics Letters
|April 17, 2003
Summary
A novel diffraction interferometer system uses multiple optical fiber sources for absolute surface profile measurement. This method accurately profiles rough surfaces, overcoming limitations of traditional interferometers.
Area of Science:
- Optical Metrology
- Surface Profilometry
- Diffraction Interferometry
Background:
- Conventional two-arm interferometers struggle with measuring surfaces exhibiting significant irregularities.
- Accurate surface profile metrology is crucial for quality control in various manufacturing and research fields.
Purpose of the Study:
- To introduce a new interferometer system for advanced surface profile metrology.
- To enable absolute profile measurements on challenging, rough surfaces.
Main Methods:
- Development of a diffraction interferometer system utilizing multiple two-point-diffraction sources from single-mode optical fibers.
- Projection of multiple fringe patterns onto the object surface.
- Absolute profile measurement achieved by fitting phase data to a global multilateration model.
Main Results:
- The proposed system successfully performs absolute surface profile measurements.
- Demonstrated suitability for profiling rough surfaces with excessive irregularities.
- Outperforms conventional two-arm interferometers on difficult-to-measure surfaces.
Conclusions:
- The novel diffraction interferometer offers a robust solution for surface metrology.
- This technology expands the capability of surface profiling to previously challenging irregular surfaces.