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Etchant solutions for the removal of Cu(0) in a supercritical CO2-based "dry" chemical mechanical planarization

Carol A Bessel1, Ginger M Denison, Joseph M DeSimone

  • 1Department of Chemistry, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina 27599, USA.

Journal of the American Chemical Society
|April 24, 2003
PubMed

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