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Updated: Jun 26, 2026

Measuring Carbon-based Contaminant Mineralization Using Combined CO2 Flux and Radiocarbon Analyses
Published on: October 21, 2016
Spectroscopic evidence for hydrogen diffusion through a several-nanometers-thick titanium carbonitride layer on
Semyon Bocharov1, Andrew V Teplyakov
1Department of Chemistry and Biochemistry, University of Delaware, Newark, Delaware 19716, USA.
Abstract:
Multiple internal reflection Fourier transform infrared spectroscopy, together with other analytical techniques, was used to follow the diffusion of atomic hydrogen through a 10-nm-thick titanium carbonitride layer deposited onto a Si(100)-2x1 surface from tetrakis(dimethylamino)titanium as a chemical vapor deposition precursor. The recombinative desorption of hydrogen from the TiCN/Si interface was shown to coincide with the temperature range where most Ti-based diffusion barriers break down.
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