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Related Experiment Videos

Grating-enhanced through-wafer optical microprobe for microelectromechanical system high-resolution optical position

J M Dawson1, L Wang, P Famouri

  • 1Microelectronic Systems Research Center and Electromechanical Systems Research Laboratory, Lane Department of Computer Science and Electrical Engineering, West Virginia University, Morgantown, West Virginia 26506-6109, USA. dawson@csee.wvu.edu

Optics Letters
|July 30, 2003
PubMed
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A novel optical microprobe system enables precise monitoring of micro-resonator motion. This technology achieves submicrometer resolution for effective microsystem control and fault detection.

Area of Science:

  • MEMS (Micro-Electro-Mechanical Systems)
  • Optical Metrology
  • Nanotechnology

Background:

  • Lateral comb resonators are crucial micro-mechanical components.
  • Accurate monitoring of resonator displacement is essential for control and diagnostics.
  • Existing methods may lack the required resolution or non-contact capabilities.

Purpose of the Study:

  • To develop and validate a non-contact optical method for monitoring micro-resonator motion.
  • To demonstrate submicrometer positional resolution using a through-wafer optical microprobe.
  • To enable effective microsystem model parameter extraction and fault detection.

Main Methods:

  • Utilized a 1310-nm-wavelength through-wafer optical microprobe.
  • Integrated a microstructure grating with the resonator stage.

Related Experiment Videos

  • Analyzed optical signal dynamic range for displacement measurement.

    • Main Results:

    • Achieved submicrometer positional resolution based on optical signal analysis.
    • Demonstrated a peak-to-valley dynamic range corresponding to 2-micrometer displacement.
    • Successfully implemented microstructure positional feedback.

    Conclusions:

    • The optical microprobe system provides high-resolution, non-contact monitoring of micro-resonator dynamics.
    • This technique is vital for advanced microsystem control and model-based fault detection.
    • Enables precise parameter extraction for improved microsystem performance and reliability.