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Integrated optical Mach-Zehnder modulator based on polycrystalline BaTiO3.

A Petraru1, J Schubert, M Schmid

  • 1Institut für Schichten und Grenzflächen, ISG1-IT, Forschungszentrum Jülich, D-52425 Jülich, Germany. a.petraru@fz-juelich.de

Optics Letters
|December 24, 2003
PubMed
Summary

High-quality barium titanate (BaTiO3) thin films were deposited for optical applications. These films exhibit excellent optical properties and are suitable for fabricating electro-optic modulators.

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Area of Science:

  • Materials Science
  • Optoelectronics

Background:

  • Barium titanate (BaTiO3) is a promising material for electro-optic applications.
  • Developing high-quality thin films is crucial for device performance.

Purpose of the Study:

  • To deposit and characterize good-quality polycrystalline BaTiO3 thin films.
  • To fabricate and evaluate thin-film electro-optic Mach-Zehnder modulators using these films.

Main Methods:

  • Pulsed laser deposition was used to deposit BaTiO3 thin films on MgO substrates.
  • Deposition parameters were optimized for optical quality.
  • Standard lithography and ion-beam etching were employed for waveguide fabrication.
  • Ridge-type waveguides were patterned for single-mode propagation.

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Main Results:

  • Optimized deposition yielded optical-quality BaTiO3 films with a low attenuation coefficient of 4 dB/cm at 633 nm.
  • Ridge waveguides supported single-mode propagation from 633 nm to 1550 nm.
  • An electro-optic coefficient of 22 pm/V was estimated for the polycrystalline BaTiO3 films.

Conclusions:

  • Good-quality polycrystalline BaTiO3 thin films can be fabricated using pulsed laser deposition.
  • These films are suitable for fabricating efficient thin-film electro-optic modulators.
  • The demonstrated electro-optic properties suggest potential for integrated photonic devices.