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Optimizing precision of rotating-analyzer and rotating-compensator ellipsometers.

D E Aspnes1

  • 1Department of Physics, North Carolina State University, Raleigh, North Carolina 27695-8202, USA. aspnes@unity.ncsu.edu

Journal of the Optical Society of America. A, Optics, Image Science, and Vision
|March 10, 2004
PubMed
Summary

This study compares rotating-analyzer ellipsometer (RAE) and rotating-compensator ellipsometer (RCE) performance. The RCE excels at determining delta, while the RAE is better for psi under broadband conditions.

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Area of Science:

  • Optical Physics
  • Materials Science
  • Spectroscopy

Background:

  • Ellipsometry is a powerful optical technique for characterizing material surfaces and thin films.
  • Shot-noise-limited uncertainties are critical for accurate ellipsometric measurements.
  • Rotating-analyzer ellipsometer (RAE) and rotating-compensator ellipsometer (RCE) are common configurations.

Purpose of the Study:

  • To investigate and compare the shot-noise-limited uncertainties of ellipsometric parameters psi and delta for RAE and RCE.
  • To analyze the impact of correlations among Fourier coefficients on measurement uncertainties.
  • To determine optimal measurement conditions for both RAE and RCE configurations.

Main Methods:

  • General theoretical development of uncertainties for RAE and RCE.

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  • Inclusion of correlations among Fourier coefficients, including normalization effects.
  • Numerical simulations for broadband operation (1.5–6.0 eV) using a silicon (Si) sample.

    • Main Results:

    • Identified optimal measurement conditions for RAE and RCE, involving balanced TE/TM reflected intensity and specific analyzer azimuth for RCE.
    • Quantified uncertainties in terms of traditional delta(psi) and delta(delta), and proposed Poincaré sphere area as a more appropriate measure.
    • Demonstrated that RCE is superior for determining delta, and RAE for psi, under typical broadband conditions.

    Conclusions:

    • The RCE offers advantages for determining the delta parameter, while the RAE is better suited for psi determination in broadband ellipsometry.
    • The theoretical framework can be extended to other ellipsometer configurations and uncertainty types.
    • Optimizing measurement conditions significantly impacts the precision of ellipsometric parameters.