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Thin film analysis in the nanometer scale.

K Wetzig1, H D Bauer

  • 1Institut für Festkörper- und Werkstofforschung Dresden e.V., Institut für Festkörperanalytik und Strukturforschung, Postfach 27 00 16, D-01171, Dresden, Germany.

Analytical and Bioanalytical Chemistry
|June 1, 1996
PubMed
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Analytical Transmission Electron Microscopy (ATEM) offers simultaneous imaging, analytical, and microdiffraction techniques for nanoscale material analysis. This survey discusses its applications and limitations in thin film research.

Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Analytical Transmission Electron Microscopy (ATEM) integrates multiple techniques for advanced material characterization.
  • Simultaneous imaging, analytical, and microdiffraction capabilities offer significant advantages.

Purpose of the Study:

  • To present the state of the art in ATEM.
  • To discuss the advantages and limitations of various ATEM techniques.
  • To highlight applications in thin film research.

Main Methods:

  • Utilizes simultaneous imaging, analytical, and microdiffraction techniques.
  • Employs energy dispersive X-ray spectrometry (EDXS) and electron energy loss spectrometry (EELS).
  • Incorporates energy selected imaging (ESI) for nanometer resolution microscopy.

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Main Results:

  • Achieves lateral resolution in the 1.5 nm range.
  • Demonstrates the utility of EDXS and EELS as ATEM attachments.
  • Highlights ESI for producing high-resolution images.

Conclusions:

  • ATEM provides powerful capabilities for nanoscale material analysis.
  • Understanding the advantages and limitations of each technique is crucial for effective application.
  • ATEM is highly valuable for addressing material problems in thin film research.