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Characteristic temperatures and electron number densities in an R.F. capacitively coupled plasma
S D Anghel1, T Frentiu, E Darvasi
1Physics Department, University of Cluj, 3400, Cluj-Napoca, Romania.
Analytical and Bioanalytical Chemistry
|June 1, 1996
Abstract:
The excitation temperatures of Ar and Fe, the ionization temperatures of Ar and Ca and the electron number densities have been determined for a radiofrequency capacitively coupled plasma in the tip-ring electrode geometry. The temperatures and the electron number densities possess their maximum value close to the electrodes.