Related Experiment Videos
High resolution depth profile analysis by elastic recoil detection with heavy ions
G Dollinger1, A Bergmaier, T Faestermann
1Technische Universität München, Physik-Department E12, D-85747, Garching, Germany.
Analytical and Bioanalytical Chemistry
|October 1, 1995
Summary
Elastic recoil detection (ERD) provides accurate elemental depth profiling in thin films using energetic heavy ions. This technique achieves high resolution, enabling detailed analysis of light and medium-heavy elements, even at interfaces.
Area of Science:
- Materials Science
- Nuclear Physics
- Analytical Chemistry
Background:
- Elastic recoil detection (ERD) is a powerful technique for analyzing thin film composition.
- Accurate depth profiling is crucial for understanding material properties and performance.
Purpose of the Study:
- To evaluate the effectiveness of ERD with energetic heavy ions for elemental depth profiling.
- To demonstrate the high resolution and quantitative capabilities of the ERD method.
Main Methods:
- Utilized energetic heavy ions (60-120 MeV 127I) for ERD analysis.
- Employed the Q3D magnetic spectrograph for high-resolution energy measurements (0.07% relative energy resolution).
- Achieved a large solid angle of detection (5 msr) to ensure measurement accuracy.
Main Results:
- Demonstrated reliable and quantitative elemental and isotopic depth profiles.
- Achieved atomic depth resolution near the surface on carbon samples.
- Successfully investigated carbon profiles in thin carbon layers, resolving gradiated interfaces.
Conclusions:
- ERD with energetic heavy ions is a suitable method for precise elemental depth profiling in thin films.
- The combination of high energy resolution and large solid angle enables detailed analysis of elemental distributions and interfaces.