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Updated: Aug 9, 2026
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Molecular Beam Mass Spectrometry With Tunable Vacuum Ultraviolet (VUV) Synchrotron Radiation
Published on: October 30, 2012
Vacuum-ultraviolet beam array generation by flat micro-optical structures
R Grunwald1, U Neumann, V Kebbel
1Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie, Max-Born-Strasse 2A, D-12489 Berlin, Germany. grunwald@mbiberlin.de
Optics Letters
|May 18, 2004
Abstract:
Micro-optical structures for VUV laser beam shaping and wave-front sensing were manufactured by thin-film deposition onto CaF2 and transfer by etching. Arrays of Bessel-like F2 laser beams at a wavelength of 157 nm with extremely small conical angles were generated by microaxicon lenses. Beam propagation was studied in simulations and experiments. Apodization by absorbing layers is proposed for beam cleaning.
