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Updated: Aug 23, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
The commissioning of a flexible low-cost multipurpose X-ray beamline at SRRC
C H Lee1, C S Hwang, P K Tseng
1Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30043, Taiwan, and Synchrotron Radiation Research Centre, Hsinchu 30077, Taiwan.
Abstract:
A low-cost multipurpose X-ray beamline has been commissioned at the bending magnet B15 of the Synchrotron Radiation Research Center (SRRC). The beamline is constructed in such a way to accommodate the various needs of small research consortia, from universities or research institutes, whose requirements of a beamline facility are quite diverse while under limited funding support. Flexibility is the special feature of this beamline. It is capable of performing quick test measurements without a prolonged reviewing process. Switching between different techniques, such as white-beam irradiation, EXAFS and X-ray scattering, can be achieved within 1 h. Novel experiments, such as energy-dispersive small-angle scattering experiments and energy-dispersive reflectivity measurements, can also be performed.

