Characterization of substrates for use in X-ray multilayer optics
G S Lodha1, K Yamashita, K Haga
1Department of Physics, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8602, Japan.
Journal of Synchrotron Radiation
|July 21, 2004
Abstract:
The optical performance of platinum-carbon multilayers deposited onto different substrates has been examined. Specular reflectivity and non-specular diffuse scattering were measured to study the replication of substrate roughness into the multilayer structure. Surface topography was measured before and after deposition using a scanning probe microscope and a mechanical profiler.
