High-accuracy detector calibration in the 3-1500 eV spectral range at the PTB radiometry laboratory

State-of-the-art detector calibration in the UV/VUV and soft X-ray spectral ranges at the Physikalisch-Technische Bundesanstalt (PTB) is based on the primary detector standard SYRES, a cryogenic electrical substitution radiometer capable of measuring radiant power of a few micro W. At the PTB radiometry laboratory at the synchrotron radiation facility BESSY, two dedicated beamlines are operated, providing monochromatic radiation of high spectral purity, high radiant power and tunable photon energy in the 3-1500 eV range. The spectral responsivity of detectors, e.g. photodiodes, can be measured with a relative uncertainty of about 1% by direct comparison with SYRES, as will be demonstrated for PtSi/Si and GaAsP/Au Schottky and silicon n-on-p photodiodes. The calibration of photon-counting detectors traceable to SYRES can by accomplished by exploiting the unique capability to scale the spectral photon flux over several orders of magnitude by changing the stored electron current. Calibrations of CCDs and photomultipliers are presented as examples.